Invention Grant
- Patent Title: Selective partial gate stack for improved device isolation
- Patent Title (中): 选择性部分栅极堆叠,用于改进器件隔离
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Application No.: US13298783Application Date: 2011-11-17
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Publication No.: US08466496B2Publication Date: 2013-06-18
- Inventor: Xiaojun Yu , Dureseti Chidambarrao , Brian J. Greene , Yue Liang
- Applicant: Xiaojun Yu , Dureseti Chidambarrao , Brian J. Greene , Yue Liang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/8238 ; H01L27/092

Abstract:
A complementary metal oxide semiconductor (CMOS) device that may include a substrate having a first active region and a second active region that are separated from one another by an isolation region. An n-type semiconductor device is present on the first active region that includes a first gate structure having a first gate dielectric layer and an n-type work function metal layer, wherein the n-type work function layer does not extend onto the isolation region. A p-type semiconductor device is present on the second active region that includes a second gate structure having a second gate dielectric layer and a p-type work function metal layer, wherein the p-type work function layer does not extend onto the isolation region. A connecting gate structure extends across the isolation region into direct contact with the first gate structure and the second gate structure.
Public/Granted literature
- US20130126976A1 SELECTIVE PARTIAL GATE STACK FOR IMPROVED DEVICE ISOLATION Public/Granted day:2013-05-23
Information query
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