发明授权
US08451563B1 Method for providing a side shield for a magnetic recording transducer using an air bridge
有权
用于使用空气桥提供用于磁记录换能器的侧屏蔽的方法
- 专利标题: Method for providing a side shield for a magnetic recording transducer using an air bridge
- 专利标题(中): 用于使用空气桥提供用于磁记录换能器的侧屏蔽的方法
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申请号: US13331208申请日: 2011-12-20
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公开(公告)号: US08451563B1公开(公告)日: 2013-05-28
- 发明人: Jinqiu Zhang , Feng Liu , Shaoping Li , Ming Sun
- 申请人: Jinqiu Zhang , Feng Liu , Shaoping Li , Ming Sun
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: G11B5/17
- IPC分类号: G11B5/17 ; G11B5/127
摘要:
A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.
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