Invention Grant
- Patent Title: Semiconductor integrated circuit device including a fin-type field effect transistor and method of manufacturing the same
- Patent Title (中): 包括鳍型场效应晶体管的半导体集成电路器件及其制造方法
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Application No.: US13407685Application Date: 2012-02-28
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Publication No.: US08445951B2Publication Date: 2013-05-21
- Inventor: Hiroshi Furuta , Takayuki Shirai , Shunsaku Naga
- Applicant: Hiroshi Furuta , Takayuki Shirai , Shunsaku Naga
- Applicant Address: JP Kawasaki-shi, Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi, Kanagawa
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2009-39916 20090223
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94

Abstract:
A semiconductor integrated circuit device, includes a first electrode including a first semiconductor layer formed on a substrate, a side surface insulating film formed on at least a part of a side surface of the first electrode, an upper surface insulating film formed on the first electrode and the side surface insulating film, a second electrode which covers the side surface insulating film and the upper surface insulating film, and a fin-type field effect transistor. The first electrode, the side surface insulating film, and the second electrode constitute a capacitor element. A thickness of the upper surface insulating film between the first electrode and the second electrode is larger than a thickness of the side surface insulating film between the first electrode and the second electrode, and the fin-type field effect transistor includes a second semiconductor layer which protrudes with respect to the plane of the substrate.
Public/Granted literature
- US20120153370A1 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2012-06-21
Information query
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