Invention Grant
US08445951B2 Semiconductor integrated circuit device including a fin-type field effect transistor and method of manufacturing the same 有权
包括鳍型场效应晶体管的半导体集成电路器件及其制造方法

Semiconductor integrated circuit device including a fin-type field effect transistor and method of manufacturing the same
Abstract:
A semiconductor integrated circuit device, includes a first electrode including a first semiconductor layer formed on a substrate, a side surface insulating film formed on at least a part of a side surface of the first electrode, an upper surface insulating film formed on the first electrode and the side surface insulating film, a second electrode which covers the side surface insulating film and the upper surface insulating film, and a fin-type field effect transistor. The first electrode, the side surface insulating film, and the second electrode constitute a capacitor element. A thickness of the upper surface insulating film between the first electrode and the second electrode is larger than a thickness of the side surface insulating film between the first electrode and the second electrode, and the fin-type field effect transistor includes a second semiconductor layer which protrudes with respect to the plane of the substrate.
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