Invention Grant
US08436437B2 High performance MTJ elements for STT-RAM and method for making the same
有权
用于STT-RAM的高性能MTJ元件和制作相同的方法
- Patent Title: High performance MTJ elements for STT-RAM and method for making the same
- Patent Title (中): 用于STT-RAM的高性能MTJ元件和制作相同的方法
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Application No.: US12803191Application Date: 2010-06-21
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Publication No.: US08436437B2Publication Date: 2013-05-07
- Inventor: Cheng T. Horng , Ru-Ying Tong , Chyu-Jiuh Torng , Witold Kula
- Applicant: Cheng T. Horng , Ru-Ying Tong , Chyu-Jiuh Torng , Witold Kula
- Applicant Address: US CA Milpitas
- Assignee: MagIC Technologies, Inc.
- Current Assignee: MagIC Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L29/82
- IPC: H01L29/82

Abstract:
A STT-MTJ MRAM cell that utilizes transfer of spin angular momentum as a mechanism for changing the magnetic moment direction of a free layer includes an IrMn pinning layer, a SyAP pinned layer, a naturally oxidized, crystalline MgO tunneling barrier layer that is formed on an Ar-ion plasma smoothed surface of the pinned layer and a free layer that comprises an amorphous layer of Co60Fe20B20 of approximately 20 angstroms thickness or an amorphous ferromagnetic layer of Co40Fe40B20 of approximately 15 angstroms thickness formed between two crystalline layers of Fe of 3 and 6 angstroms thickness respectively. The free layer is characterized by a low Gilbert damping factor and by very strong polarizing action on conduction electrons. The resulting cell has a low critical current, a high dR/R and a plurality of such cells will exhibit a low variation of both resistance and pinned layer magnetization angular dispersion.
Public/Granted literature
- US20100258889A1 High performance MTJ elements for STT-RAM and method for making the same Public/Granted day:2010-10-14
Information query
IPC分类: