Invention Grant
US08421028B2 Device for deflecting or guiding in a particle beam 有权
用于在粒子束中偏转或引导的装置

  • Patent Title: Device for deflecting or guiding in a particle beam
  • Patent Title (中): 用于在粒子束中偏转或引导的装置
  • Application No.: US12733931
    Application Date: 2008-09-26
  • Publication No.: US08421028B2
    Publication Date: 2013-04-16
  • Inventor: Dirk Preikszas
  • Applicant: Dirk Preikszas
  • Applicant Address: DE Oberkochen
  • Assignee: Carl Zeiss NTS GmbH
  • Current Assignee: Carl Zeiss NTS GmbH
  • Current Assignee Address: DE Oberkochen
  • Agency: Muirhead and Saturnelli, LLC
  • Priority: DE102007046783 20070929
  • International Application: PCT/EP2008/062967 WO 20080926
  • International Announcement: WO2009/043824 WO 20090409
  • Main IPC: H01J37/30
  • IPC: H01J37/30
Device for deflecting or guiding in a particle beam
Abstract:
A device for deflecting a particle beam out of a beam axis, or for guiding a particle beam into the beam axis, has a simple design, requires little space, and additionally ensures that no area of an object that is not to be struck is struck by a particle beam. The device may include components in the following sequence along the beam axis: first deflection element, a magnetic apparatus for providing a magnetic field axially to the beam axis, and a second deflection element. A particle beam apparatus may have a device of this type.
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