Invention Grant
- Patent Title: Device for deflecting or guiding in a particle beam
- Patent Title (中): 用于在粒子束中偏转或引导的装置
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Application No.: US12733931Application Date: 2008-09-26
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Publication No.: US08421028B2Publication Date: 2013-04-16
- Inventor: Dirk Preikszas
- Applicant: Dirk Preikszas
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss NTS GmbH
- Current Assignee: Carl Zeiss NTS GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Muirhead and Saturnelli, LLC
- Priority: DE102007046783 20070929
- International Application: PCT/EP2008/062967 WO 20080926
- International Announcement: WO2009/043824 WO 20090409
- Main IPC: H01J37/30
- IPC: H01J37/30

Abstract:
A device for deflecting a particle beam out of a beam axis, or for guiding a particle beam into the beam axis, has a simple design, requires little space, and additionally ensures that no area of an object that is not to be struck is struck by a particle beam. The device may include components in the following sequence along the beam axis: first deflection element, a magnetic apparatus for providing a magnetic field axially to the beam axis, and a second deflection element. A particle beam apparatus may have a device of this type.
Public/Granted literature
- US20100258738A1 DEVICE FOR DEFLECTING OR GUIDING IN A PARTICLE BEAM Public/Granted day:2010-10-14
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