Invention Grant
US08404367B2 Low switching current dual spin filter (DSF) element for STT-RAM and a method for making the same
有权
用于STT-RAM的低开关电流双自旋滤波器(DSF)元件及其制造方法
- Patent Title: Low switching current dual spin filter (DSF) element for STT-RAM and a method for making the same
- Patent Title (中): 用于STT-RAM的低开关电流双自旋滤波器(DSF)元件及其制造方法
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Application No.: US13317484Application Date: 2011-10-19
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Publication No.: US08404367B2Publication Date: 2013-03-26
- Inventor: Cheng T. Horng , Ru-Ying Tong
- Applicant: Cheng T. Horng , Ru-Ying Tong
- Applicant Address: US CA Milpitas
- Assignee: MagIC Technologies, Inc.
- Current Assignee: MagIC Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: G11B5/39
- IPC: G11B5/39

Abstract:
A dual spin filter that minimizes spin-transfer magnetization switching current (Jc) while achieving a high dR/R in STT-RAM devices is disclosed. The bottom spin valve has a MgO tunnel barrier layer formed with a natural oxidation process to achieve low RA, a CoFe/Ru/CoFeB—CoFe pinned layer, and a CoFeB/FeSiO/CoFeB composite free layer with a middle nanocurrent channel (NCC) layer to minimize Jc0. The NCC layer may have be a composite wherein conductive M(Si) grains are magnetically coupled with adjacent ferromagnetic layers and are formed in an oxide, nitride, or oxynitride insulator matrix. The upper spin valve has a Cu spacer to lower the free layer damping constant. A high annealing temperature of 360° C. is used to increase the MR ratio above 100%. A Jc0 of less than 1×106 A/cm2 is expected based on quasistatic measurements of a MTJ with a similar MgO tunnel barrier and composite free layer.
Public/Granted literature
- US20120040207A1 Low switching current dual spin filter (DSF) element for STT-RAM and a method for making the same Public/Granted day:2012-02-16
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