发明授权
US08389357B2 Method of fabricating a memory device having a memory array including a plurality of memory cell transistors arranged in rows and columns
有权
一种具有存储阵列的存储器件的制造方法,所述存储器阵列包括以行和列排列的多个存储单元晶体管
- 专利标题: Method of fabricating a memory device having a memory array including a plurality of memory cell transistors arranged in rows and columns
- 专利标题(中): 一种具有存储阵列的存储器件的制造方法,所述存储器阵列包括以行和列排列的多个存储单元晶体管
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申请号: US13052728申请日: 2011-03-21
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公开(公告)号: US08389357B2公开(公告)日: 2013-03-05
- 发明人: Ronald Kakoschke , Thomas Nirschl , Danny Shum , Klaus Schrüfer
- 申请人: Ronald Kakoschke , Thomas Nirschl , Danny Shum , Klaus Schrüfer
- 申请人地址: DE Neubiberg
- 专利权人: Infineon Technologies AG
- 当前专利权人: Infineon Technologies AG
- 当前专利权人地址: DE Neubiberg
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method of fabricating a memory device in a semiconductor substrate, the device having a memory array having a plurality of memory cell transistors arranged in rows and columns. The method includes forming a plurality of tunneling field effect transistors, forming a first well of the second doping type, forming a second well of the first doping type surrounding the first well, forming a first word line connected to a first row of memory cell transistors, forming a first bit line to control a voltage of doped drain regions of tunneling field effect transistors of a first column of memory cell transistors, and forming a second bit line parallel to the first bit line.
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