发明授权
- 专利标题: Measurement device and measurement method
- 专利标题(中): 测量装置及测量方法
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申请号: US13281883申请日: 2011-10-26
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公开(公告)号: US08384911B2公开(公告)日: 2013-02-26
- 发明人: Osamu Nomura , Masakazu Matsugu
- 申请人: Osamu Nomura , Masakazu Matsugu
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. IP Division
- 优先权: JP2010-244369 20101029
- 主分类号: G01B11/24
- IPC分类号: G01B11/24
摘要:
A measurement device includes a pattern light characteristic setting unit configured to set illumination light having a pattern light characteristic to be projected onto a measurement object, a reflected light measurement unit configured to measure reflected light when the measurement object is irradiated with the illumination light on, an image feature extraction unit configured to extract from the measured reflected light an image feature based on a physical characteristic of the measurement object, a feature distribution calculation unit configured to calculate a distribution characteristic for each local region of the image feature, and a pattern light control unit configured to control the pattern light characteristic of the illumination light, which includes a pattern light characteristic for distance measurement and a pattern light characteristic for image feature extraction, based on the calculated distribution characteristic for each local region.
公开/授权文献
- US20120105868A1 MEASUREMENT DEVICE AND MEASUREMENT METHOD 公开/授权日:2012-05-03
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