发明授权
US08377626B2 Methods of forming a pattern using negative-type photoresist compositions
有权
使用负型光致抗蚀剂组合物形成图案的方法
- 专利标题: Methods of forming a pattern using negative-type photoresist compositions
- 专利标题(中): 使用负型光致抗蚀剂组合物形成图案的方法
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申请号: US12662076申请日: 2010-03-30
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公开(公告)号: US08377626B2公开(公告)日: 2013-02-19
- 发明人: Kyoung-Mi Kim , Jin-Baek Kim , Ji-Young Park , Young-Ho Kim
- 申请人: Kyoung-Mi Kim , Jin-Baek Kim , Ji-Young Park , Young-Ho Kim
- 申请人地址: KR Suwon-si, Gyeonggi-do KR Yuseong-gu, Daejeon
- 专利权人: Samsung Electronics Co., Ltd.,Korea Advanced Institute of Science and Technology
- 当前专利权人: Samsung Electronics Co., Ltd.,Korea Advanced Institute of Science and Technology
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do KR Yuseong-gu, Daejeon
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2009-0027541 20090331
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G03F7/004 ; G03F7/40
摘要:
A method of forming a pattern and a negative-type photoresist composition, the method including forming a photoresist film on a substrate by coating a photoresist composition thereon, the photoresist composition including a polymer, a photoacid generator, and a solvent, wherein the polymer includes an alkoxysilyl group as a side chain and is cross-linkable by an acid to be insoluble in a developer; curing a first portion of the photoresist film by exposing the first portion to light, the exposed first portion being cured by a cross-linking reaction of the alkoxysilyl groups therein; and providing a developer to the photoresist film to remove a second portion of the photoresist film that is not exposed to light, thereby forming a photoresist pattern on the substrate.
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