Invention Grant
- Patent Title: On-chip inductor structure and method for manufacturing the same
- Patent Title (中): 片上电感结构及其制造方法
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Application No.: US12607433Application Date: 2009-10-28
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Publication No.: US08373250B2Publication Date: 2013-02-12
- Inventor: Tzu-Yuan Chao , Ming-Chieh Hsu , Yu-Ting Cheng , Chih Chen , Chien-Min Lin
- Applicant: Tzu-Yuan Chao , Ming-Chieh Hsu , Yu-Ting Cheng , Chih Chen , Chien-Min Lin
- Applicant Address: TW Hsinchu
- Assignee: National Chiao Tung University
- Current Assignee: National Chiao Tung University
- Current Assignee Address: TW Hsinchu
- Agency: Rosenberg, Klein & Lee
- Priority: TW98128200A 20090821
- Main IPC: H01L29/86
- IPC: H01L29/86

Abstract:
The present invention relates to a an on-chip inductor structure and a method for manufacturing the same. The an on-chip inductor structure according to the present invention comprises a substrate, a porous layer, a plurality of conductors, and an inductor. The porous layer is disposed on the substrate and has a plurality of voids; each of the plurality of conductors is disposed in the plurality of voids, respectively; and the inductor is disposed on the porous layer. Because the plurality of conductors is used as the core of the inductor, the inductance is increased effectively and the area of the an on-chip inductor is reduced. Besides the manufacturing method according to the present invention is simple and compatible with the current CMOS process, the manufacturing cost can be lowered.
Public/Granted literature
- US20110042782A1 ON-CHIP INDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2011-02-24
Information query
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