发明授权
- 专利标题： Method and apparatus for extracting ions from an ion source for use in ion implantation
- 专利标题（中）： 用于离子注入离子源提取离子的方法和装置
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申请号： US11648269申请日： 2006-12-29
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公开(公告)号： US08368309B2公开(公告)日： 2013-02-05
- 发明人: Thomas N. Horsky , Robert W. Milgate, III , George P. Sacco, Jr. , Dale Conrad Jacobson , Wade Allen Krull
- 申请人： Thomas N. Horsky , Robert W. Milgate, III , George P. Sacco, Jr. , Dale Conrad Jacobson , Wade Allen Krull
- 申请人地址： US MA North Billerica
- 专利权人： SemEquip, Inc.
- 当前专利权人： SemEquip, Inc.
- 当前专利权人地址： US MA North Billerica
- 代理机构： Katten Muchin Rosenman LLP
- 代理商 John S. Paniaguas
- 主分类号： H01J7/24
- IPC分类号： H01J7/24 ; H01J27/00
摘要：
Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.
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