发明授权
- 专利标题: Scanning electron microscope and image signal processing method
- 专利标题(中): 扫描电子显微镜和图像信号处理方法
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申请号: US11520802申请日: 2006-09-14
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公开(公告)号: US08362426B2公开(公告)日: 2013-01-29
- 发明人: Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
- 申请人: Atsushi Kobaru , Katsuhiro Sasada , Hiroki Kawada
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2005-267089 20050914
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
The SEM has a dynamic range reference value setting unit for setting dynamic range reference values, a dynamic range adjustment unit for receiving an observation image signal delivered out of a secondary electron detector, adjusting the dynamic range of the observation image signal on the basis of the dynamic range reference values and outputting the thus adjusted observation image signal as an observation image signal after adjustment, a display image generation unit for determining luminous intensity levels of individual pixels of an image to be displayed based on the observation image signal after adjustment to generate a display image, a histogram generation unit for generating a histogram of luminous intensity levels of the display image and extracting, as a luminous intensity peak value, at which the frequency of luminous intensity is maximized, and a display unit for displaying the generated histogram and the extracted luminous intensity peak value.
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