Invention Grant
- Patent Title: Stripper for dry film removal
- Patent Title (中): 剥皮机用于干膜去除
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Application No.: US12394183Application Date: 2009-02-27
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Publication No.: US08357646B2Publication Date: 2013-01-22
- Inventor: Wen Dar Liu , Yi Chia Lee , Archie Liao , Madhukar Bhaskara Rao , Matthew I. Egbe , Chimin Sheu , Michael Walter Legenza
- Applicant: Wen Dar Liu , Yi Chia Lee , Archie Liao , Madhukar Bhaskara Rao , Matthew I. Egbe , Chimin Sheu , Michael Walter Legenza
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Lina Yang
- Main IPC: B08B3/00
- IPC: B08B3/00

Abstract:
The present invention, in a preferred embodiment, is a photoresist stripper formulation, comprising: Hydroxylamine ; Water; a solvent selected from the group consisting of dimethylsulfoxide; N-methylpyrrrolidine; dimethylacetamide; dipropylene glycol monomethyl ether; monoethanolamine and mixtures thereof; a base selected from the group consisting of choline hydroxide, monoethanolamine, tetramethylammonium hydroxide; aminoethylethanolamine and mixtures thereof; a metal corrosion inhibitor selected from the group consisting of catechol, gallic acid, lactic acid, benzotriazole and mixtures thereof; and a bath life extending agent selected from the group consisting of glycerine, propylene glycol and mixtures thereof. The present invention is also a method for using formulations as exemplified in the preferred embodiment.
Public/Granted literature
- US20090227483A1 Stripper For Dry Film Removal Public/Granted day:2009-09-10
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