Invention Grant
US08354642B2 Monolithic passive THz detector with energy concentration on sub-pixel suspended MEMS thermal sensor 有权
具有能量集中在亚像素悬浮的MEMS热传感器的单片无源THz检测器

Monolithic passive THz detector with energy concentration on sub-pixel suspended MEMS thermal sensor
Abstract:
A THz radiation detector comprising a plurality of antenna arms separated from a suspended platform by an isolating thermal air gap. The detector functions to concentrate THz radiation energy into the smaller suspended MEMS platform (e.g., membrane) upon which a thermal sensor element is located. The THz photon energy is converted into electrical energy by means of a pixilated antenna using capacitive coupling in order to couple this focused energy across the thermally isolated air gap and onto the suspended membrane on which the thermal sensor is located.
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