Invention Grant
US08354642B2 Monolithic passive THz detector with energy concentration on sub-pixel suspended MEMS thermal sensor
有权
具有能量集中在亚像素悬浮的MEMS热传感器的单片无源THz检测器
- Patent Title: Monolithic passive THz detector with energy concentration on sub-pixel suspended MEMS thermal sensor
- Patent Title (中): 具有能量集中在亚像素悬浮的MEMS热传感器的单片无源THz检测器
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Application No.: US12903235Application Date: 2010-10-13
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Publication No.: US08354642B2Publication Date: 2013-01-15
- Inventor: Israel Berger , Danny Elad , David Goren , Thomas Erwin Morf
- Applicant: Israel Berger , Danny Elad , David Goren , Thomas Erwin Morf
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Woods Oviatt Gilman LLP.
- Agent Zaretskv Howard
- Main IPC: H01L27/14
- IPC: H01L27/14

Abstract:
A THz radiation detector comprising a plurality of antenna arms separated from a suspended platform by an isolating thermal air gap. The detector functions to concentrate THz radiation energy into the smaller suspended MEMS platform (e.g., membrane) upon which a thermal sensor element is located. The THz photon energy is converted into electrical energy by means of a pixilated antenna using capacitive coupling in order to couple this focused energy across the thermally isolated air gap and onto the suspended membrane on which the thermal sensor is located.
Public/Granted literature
- US20120091342A1 MONOLITHIC PASSIVE THz DETECTOR WITH ENERGY CONCENTRATION ON SUB-PIXEL SUSPENDED MEMS THREMAL SENSOR Public/Granted day:2012-04-19
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