发明授权
- 专利标题: Friction sensor for polishing system
- 专利标题(中): 抛光系统摩擦传感器
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申请号: US12433433申请日: 2009-04-30
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公开(公告)号: US08342906B2公开(公告)日: 2013-01-01
- 发明人: Gabriel Lorimer Miller , Manoocher Birang , Nils Johansson , Boguslaw A. Swedek , Dominic J. Benvegnu
- 申请人: Gabriel Lorimer Miller , Manoocher Birang , Nils Johansson , Boguslaw A. Swedek , Dominic J. Benvegnu
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson P.C.
- 主分类号: B24B49/00
- IPC分类号: B24B49/00
摘要:
A system method and apparatus to monitor a frictional coefficient of a substrate undergoing polishing is described. A polishing pad assembly includes a polishing layer including a polishing surface, and a substrate contacting member flexibly coupled to the polishing layer having a top surface to contact an exposed surface of a substrate. At least a portion of the top surface is substantially coplanar with the polishing surface. A sensor is provided to measure a lateral displacement of the substrate contacting member. Some embodiments may provide accurate endpoint detection during chemical mechanical polishing to indicate the exposure of an underlying layer.
公开/授权文献
- US20090253351A1 FRICTION SENSOR FOR POLISHING SYSTEM 公开/授权日:2009-10-08
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