发明授权
- 专利标题: Decompressing type heater, its heating method, and electronic product manufacturing method
- 专利标题(中): 解压式加热器,其加热方式和电子产品制造方法
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申请号: US12451070申请日: 2008-12-08
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公开(公告)号: US08271124B2公开(公告)日: 2012-09-18
- 发明人: Sotaro Ol , Masanari Matsuura , Tomoyuki Kubota , Masaya Tsuruta
- 申请人: Sotaro Ol , Masanari Matsuura , Tomoyuki Kubota , Masaya Tsuruta
- 申请人地址: JP Toyota JP Tokyo
- 专利权人: Toyota Jidosha Kabushiki Kaisha,Hirata Corporation
- 当前专利权人: Toyota Jidosha Kabushiki Kaisha,Hirata Corporation
- 当前专利权人地址: JP Toyota JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2008-007953 20080117
- 国际申请: PCT/JP2008/072230 WO 20081208
- 国际公布: WO2009/090808 WO 20090723
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
An object is heated to a preheating temperature in an atmosphere of a reducing gas under the atmospheric pressure while adjusting the setting of the emissivity of a non-contact temperature measuring part and regulating the temperature of the object according to the measured value measured by a contact temperature measuring part. The pressure of the atmosphere is reduced. The object is further heated to a heating temperature under a lowered pressure while regulating the temperature of the object according to the measured value measured by the non-contact temperature measuring part whose setting of the emissivity is adjusted during the heating process to the preheating temperature. The pressure of the atmosphere is increased back to the atmospheric pressure while maintaining the heating temperature of the object. The temperature of the object is decreased under the atmospheric pressure. With this, in the process of heating an object under a lowered pressure, the actual temperature of the object is managed over the whole steps, and the object can be most suitably heated according to the actual temperature.
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