发明授权
US08269976B2 Gyroscope utilizing MEMS and optical sensing 有权
陀螺仪利用MEMS和光学感测

Gyroscope utilizing MEMS and optical sensing
摘要:
A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis. In certain embodiments, the gyroscope is a microelectromechanical system (MEMS) gyroscope.
公开/授权文献
信息查询
0/0