发明授权
- 专利标题: Gyroscope utilizing MEMS and optical sensing
- 专利标题(中): 陀螺仪利用MEMS和光学感测
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申请号: US12770545申请日: 2010-04-29
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公开(公告)号: US08269976B2公开(公告)日: 2012-09-18
- 发明人: Onur Kilic , Michel J. F. Digonnet , Gordon S. Kino , Olav Solgaard
- 申请人: Onur Kilic , Michel J. F. Digonnet , Gordon S. Kino , Olav Solgaard
- 申请人地址: US CA Palo Alto
- 专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人: The Board of Trustees of the Leland Stanford Junior University
- 当前专利权人地址: US CA Palo Alto
- 代理机构: Knobbe, Martens, Olson & Bear LLP
- 主分类号: G01C19/72
- IPC分类号: G01C19/72 ; G01C19/00 ; G01B9/02 ; G01P9/00 ; G01P15/14
摘要:
A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis. In certain embodiments, the gyroscope is a microelectromechanical system (MEMS) gyroscope.
公开/授权文献
- US20100309474A1 GYROSCOPE UTILIZING MEMS AND OPTICAL SENSING 公开/授权日:2010-12-09
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