发明授权
- 专利标题： Method of manufacturing composite structure, impurity removal processing apparatus, film forming apparatus, composite structure and raw material powder
- 专利标题（中）： 复合结构，杂质去除处理装置，成膜装置，复合结构和原料粉末的制造方法
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申请号： US11919804申请日： 2006-09-27
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公开(公告)号： US08268408B2公开(公告)日： 2012-09-18
- 发明人: Tetsu Miyoshi
- 申请人： Tetsu Miyoshi
- 申请人地址： JP Tokyo
- 专利权人： FUJIFILM Corporation
- 当前专利权人： FUJIFILM Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Sughrue Mion, PLLC
- 优先权： JP2005-289261 20050930
- 国际申请： PCT/JP2006/319814 WO 20060927
- 国际公布： WO2007/037498 WO 20070405
- 主分类号： B05D3/00
- IPC分类号： B05D3/00 ; B05D5/12
摘要：
A film forming apparatus for forming a film according to an AD method in which separation of the film or generation of hillocks is suppressed when the film formed on a substrate is heat-treated. The apparatus includes: an aerosol generating unit (1-4) for dispersing raw material powder (20) with a gas, thereby aerosolizing the raw material powder (20); a processing unit (6) for processing the raw material powder (20) aerosolized by the aerosol generating unit (1-4) to reduce an amount of impurity, which generates a gas by being heated, adhering to or contained in the raw material powder (20); and an injection nozzle (9) for spraying the aerosolized raw material powder (20) processed by the processing unit (6) toward a substrate (30) to deposit the raw material powder (20) on the substrate (30).
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