发明授权
- 专利标题: Through silicon via (TSV) wire bond architecture
- 专利标题(中): 通过硅通孔(TSV)引线结构
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申请号: US12838213申请日: 2010-07-16
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公开(公告)号: US08264067B2公开(公告)日: 2012-09-11
- 发明人: Oscar M. K. Law , Kuo H. Wu , Wei-Chih Yeh
- 申请人: Oscar M. K. Law , Kuo H. Wu , Wei-Chih Yeh
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L23/535
- IPC分类号: H01L23/535
摘要:
A through silicon via architecture for integrated circuits is provided. The integrated circuit (IC) includes a substrate with a top surface and a bottom surface with circuitry formed on the top surface, a plurality of bonding pads formed along a periphery of the bottom surface, and a backside metal layer (BML) formed on the bottom surface and electrically coupled to a second subset of bonding pads in the plurality of bonding pads. A first subset of bonding pads in the plurality of bonding pads is electrically coupled to circuitry on the top surface with through silicon vias (TSV). The BML distributes electrical signals provided by the second subset of bonding pads.
公开/授权文献
- US20110084365A1 Through Silicon Via (TSV) Wire Bond Architecture 公开/授权日:2011-04-14
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