Invention Grant
- Patent Title: Actuator and method for driving actuator
- Patent Title (中): 执行机构及其驱动方法
-
Application No.: US13282089Application Date: 2011-10-26
-
Publication No.: US08217555B2Publication Date: 2012-07-10
- Inventor: Michihito Ueda , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: Michihito Ueda , Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2010-185762 20100823
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/24

Abstract:
The purpose of the present invention is to provide a method for driving an actuator in which unnecessary deformation is suppressed.The present invention provides a method for driving an actuator, comprising the following steps (a) and (b): a step (a) of preparing the actuator, wherein the actuator comprises a first electrode, a piezoelectric layer composed of (Bi,Na,Ba)TiO3, and a second electrode, the piezoelectric layer is interposed between the first electrode and the second electrode, +X direction, +Y direction, and +Z direction denote [100] direction, [01-1] direction, and [011] direction, respectively, and the piezoelectric layer is preferentially oriented along the +Z direction; and a step (b) of applying a potential difference between the first electrode and the second electrode to drive the actuator.
Public/Granted literature
- US20120043857A1 ACTUATOR AND METHOD FOR DRIVING ACTUATOR Public/Granted day:2012-02-23
Information query
IPC分类: