Invention Grant
- Patent Title: Optical inspection apparatus
- Patent Title (中): 光学检测仪器
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Application No.: US12580619Application Date: 2009-10-16
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Publication No.: US08189183B2Publication Date: 2012-05-29
- Inventor: Hsueh-Ching Shih , Jia-Huey Tsao , Chih-Cheng Feng , Chun-Lin Chiang , Chun-Min Su , Kuo-Chi Chiu
- Applicant: Hsueh-Ching Shih , Jia-Huey Tsao , Chih-Cheng Feng , Chun-Lin Chiang , Chun-Min Su , Kuo-Chi Chiu
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: WPAT., P.C.
- Agent Justin King
- Priority: TW98111176A 20090403
- Main IPC: G01N21/01
- IPC: G01N21/01 ; G01N21/55 ; G01M19/00

Abstract:
An optical inspection apparatus capable of adjusting an incident angle of a detected light beam and adjusting a detecting angle for detecting the detected light beam. A driving mechanism is used to actuate two arms having a light source and a detector disposed thereon respectively to conduct a relative movement between the two arms so as to control the incident angle and the detecting angle. By means of the embodiments, mechanism for adjusting the angle is simplified so that the apparatus is capable of being adapted to combine with the application of micro sensors such that practicality of modularization design and microminiaturization and convenience of operation are capable of being greatly improved and that the cost can be reduced.
Public/Granted literature
- US20100253947A1 OPTICAL INSPECTION APPARATUS Public/Granted day:2010-10-07
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