发明授权
US08174703B2 Method for fabricating a sensor, a sensor, and a method for sensing
有权
用于制造传感器的方法,传感器和用于感测的方法
- 专利标题: Method for fabricating a sensor, a sensor, and a method for sensing
- 专利标题(中): 用于制造传感器的方法,传感器和用于感测的方法
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申请号: US12436592申请日: 2009-05-06
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公开(公告)号: US08174703B2公开(公告)日: 2012-05-08
- 发明人: Wenhui Wang , Xingwei Wang
- 申请人: Wenhui Wang , Xingwei Wang
- 申请人地址: US MA Lowell
- 专利权人: University of Massachusetts
- 当前专利权人: University of Massachusetts
- 当前专利权人地址: US MA Lowell
- 代理机构: Hamilton, Brook, Smith & Reynolds, P.C.
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A method for fabricating a sensor, a sensor so fabricated, and a method for sensing a stimulus are provided. The method includes providing an elongated open channel, such as, a V-groove, in a substrate, the open channel providing a first surface; removing at least some material from at least a portion of the open channel to provide a second surface displaced from the first surface; positioning a diaphragm on the second surface; and positioning an elongated wave-guide having a beveled end in the elongated open channel wherein the beveled end is positioned over the diaphragm to define an interferometric cavity between the diaphragm and the outer surface of the wave-guide. The sensor so fabricated can provide an effective sensor for detecting acoustic emission waves, among other pressure waves.
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