发明授权
US08174050B2 Structure of a pHEMT transistor capable of nanosecond switching
有权
能够进行纳秒切换的pHEMT晶体管的结构
- 专利标题: Structure of a pHEMT transistor capable of nanosecond switching
- 专利标题(中): 能够进行纳秒切换的pHEMT晶体管的结构
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申请号: US12643088申请日: 2009-12-21
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公开(公告)号: US08174050B2公开(公告)日: 2012-05-08
- 发明人: Timothy E. Boles , Andrew K. Freeston , Costas D. Varmazis
- 申请人: Timothy E. Boles , Andrew K. Freeston , Costas D. Varmazis
- 申请人地址: US MA Lowell
- 专利权人: M/A-COM Technology Solutions Holdings, Inc.
- 当前专利权人: M/A-COM Technology Solutions Holdings, Inc.
- 当前专利权人地址: US MA Lowell
- 代理商 Christopher P. Maiorana, PC
- 主分类号: H01L29/778
- IPC分类号: H01L29/778 ; H01L21/338
摘要:
A method for fabricating a transistor and the resulting transistor is disclosed. The method generally includes steps (A) to (E). Step (A) may form a high mobility layer. The high mobility layer is generally configured to carry a two-dimensional electron gas. Step (B) may form a planar layer on the high mobility layer. Step (C) may form a barrier layer on the planar layer. Step (D) may form a doped layer on the barrier layer. The doped layer is generally a low bandgap III-V semiconductor. Step (E) may form a gate in contact with the doped layer. The gate may be separated from both a source and a drain by corresponding ungated recess regions. The high mobility layer, the planar layer, the barrier layer, the doped layer, the source, the gate and the drain are generally configured as a pseudomorphic high electron mobility transistor.
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