发明授权
- 专利标题： Probing apparatus with multiaxial stages for testing semiconductor devices
- 专利标题（中）： 用于测试半导体器件的多轴级探测装置
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申请号： US12552102申请日： 2009-09-01
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公开(公告)号： US08169227B2公开(公告)日： 2012-05-01
- 发明人: Choon Leong Lou
- 申请人： Choon Leong Lou
- 申请人地址： TW Hsinchu
- 专利权人： Star Technologies Inc.
- 当前专利权人： Star Technologies Inc.
- 当前专利权人地址： TW Hsinchu
- 代理机构： WPAT, P.C.
- 代理商 Anthony King
- 优先权： TW98117617A 20090527
- 主分类号： G01R31/00
- IPC分类号： G01R31/00 ; G01R31/02
摘要：
A probing apparatus for testing semiconductor devices comprises a housing configured to define a testing chamber, a device carrier positioned in the housing and configured to receive the semiconductor device, a platen positioned on the housing, an alignment module positioned on the platen, a planarity-adjusting module positioned on the alignment module, an angular adjusting module positioned on the planarity-adjusting module, and a card holder positioned on the angular adjusting module and configured to receive a probe card having a plurality of probes.
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