Invention Grant
- Patent Title: Integrated microphone
- Patent Title (中): 集成麦克风
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Application No.: US12845348Application Date: 2010-07-28
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Publication No.: US08169042B2Publication Date: 2012-05-01
- Inventor: Jason W. Weigold , John R. Martin , Timothy J. Brosnihan
- Applicant: Jason W. Weigold , John R. Martin , Timothy J. Brosnihan
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H01L21/00 ; G10K13/00
Abstract:
A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.
Public/Granted literature
- US20100289097A1 Integrated Microphone Public/Granted day:2010-11-18
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