Invention Grant
US08159040B2 Metal gate integration structure and method including metal fuse, anti-fuse and/or resistor
有权
金属栅极集成结构和方法,包括金属保险丝,反熔丝和/或电阻
- Patent Title: Metal gate integration structure and method including metal fuse, anti-fuse and/or resistor
- Patent Title (中): 金属栅极集成结构和方法,包括金属保险丝,反熔丝和/或电阻
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Application No.: US12119526Application Date: 2008-05-13
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Publication No.: US08159040B2Publication Date: 2012-04-17
- Inventor: Douglas D. Coolbaugh , Ebenezer E. Eshun , Ephrem G. Gebreselasie , Zhong-Xiang He , Herbert Lei Ho , Deok-kee Kim , Chandrasekharan Kothandaraman , Dan Moy , Robert Mark Rassel , John Matthew Safran , Kenneth Jay Stein , Norman Whitelaw Robson , Ping-Chuan Wang , Hongwen Yan
- Applicant: Douglas D. Coolbaugh , Ebenezer E. Eshun , Ephrem G. Gebreselasie , Zhong-Xiang He , Herbert Lei Ho , Deok-kee Kim , Chandrasekharan Kothandaraman , Dan Moy , Robert Mark Rassel , John Matthew Safran , Kenneth Jay Stein , Norman Whitelaw Robson , Ping-Chuan Wang , Hongwen Yan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Yuanmin Cai
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
A semiconductor structure and a method for fabricating the semiconductor structure provide a field effect device located and formed upon an active region of a semiconductor substrate and at least one of a fuse structure, an anti-fuse structure and a resistor structure located and formed at least in part simultaneously upon an isolation region laterally separated from the active region within the semiconductor substrate. The field effect device includes a gate dielectric comprising a high dielectric constant dielectric material and a gate electrode comprising a metal material. The at least one of the fuse structure, anti-fuse structure and resistor structure includes a pad dielectric comprising the same material as the gate dielectric, and optionally, also a fuse, anti-fuse or resistor that may comprise the same metal material as the gate electrode.
Public/Granted literature
- US20090283840A1 METAL GATE INTEGRATION STRUCTURE AND METHOD INCLUDING METAL FUSE, ANTI-FUSE AND/OR RESISTOR Public/Granted day:2009-11-19
Information query
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