Invention Grant
US08158954B2 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
有权
使用复合透镜的多轴透镜，光束系统以及复合透镜的制造方法
- Patent Title: Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens
- Patent Title (中): 使用复合透镜的多轴透镜，光束系统以及复合透镜的制造方法
-
Application No.: US12492610Application Date: 2009-06-26
-
Publication No.: US08158954B2Publication Date: 2012-04-17
- Inventor: Stefan Lanio
- Applicant: Stefan Lanio
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP02028346 20021217
- Main IPC: H01J37/141
- IPC: H01J37/141
Abstract:
The invention provides a lens system for a plurality of charged particle beams. The lens system comprises an excitation coil providing a magnetic flux to a pole piece unit having a first pole piece, a second pole piece and at least two openings for charged particle beams, wherein the two openings are arranged in one row, thereby forming a lens row, and wherein the pole piece unit has an elongated shape.
Public/Granted literature
Information query
