Invention Grant
- Patent Title: Method of magnetic tunneling layer processes for spin-transfer torque MRAM
- Patent Title (中): 旋转转矩MRAM的磁隧道层工艺方法
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Application No.: US11975045Application Date: 2007-10-17
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Publication No.: US08133745B2Publication Date: 2012-03-13
- Inventor: Tom Zhong , Rongfu Xiao , Chyu-Jiuh Torng , Adam Zhong
- Applicant: Tom Zhong , Rongfu Xiao , Chyu-Jiuh Torng , Adam Zhong
- Applicant Address: US CA Milpitas
- Assignee: MagIC Technologies, Inc.
- Current Assignee: MagIC Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for forming a MTJ in a STT-MRAM is disclosed in which the easy-axis CD is determined independently of the hard-axis CD. One approach involves two photolithography steps and two etch steps to form a post in a hard mask which is transferred through a MTJ stack of layers by a third etch process. Optionally, the third etch may stop on the tunnel barrier or in the free layer. A second embodiment involves forming a first parallel line pattern on a hard mask layer and transferring the line pattern through the MTJ stack with a first etch step. A planar insulation layer is formed adjacent to the sidewalls in the line pattern and then a second parallel line pattern is formed which is transferred by a second etch through the MTJ stack to form a post pattern. Etch end point may be controlled independently for hard-axis and easy-axis dimensions.
Public/Granted literature
- US20090104718A1 Method of magnetic tunneling layer processes for spin-transfer torque MRAM Public/Granted day:2009-04-23
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