Invention Grant
- Patent Title: Line narrowing module
- Patent Title (中): 线窄模块
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Application No.: US13086858Application Date: 2011-04-14
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Publication No.: US08126027B2Publication Date: 2012-02-28
- Inventor: J. Martin Algots , Robert A. Bergstedt , William N. Partlo , German E. Rylov , Richard L. Sandstrom
- Applicant: J. Martin Algots , Robert A. Bergstedt , William N. Partlo , German E. Rylov , Richard L. Sandstrom
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino Law LLC
- Main IPC: H01S3/22
- IPC: H01S3/22
Abstract:
An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.
Public/Granted literature
- US20110194580A1 Line Narrowing Module Public/Granted day:2011-08-11
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