发明授权
- 专利标题: Method of making master for manufacturing optical disc and method of manufacturing optical disc
- 专利标题(中): 制造光盘的制造方法和制造光盘的方法
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申请号: US10505455申请日: 2003-12-24
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公开(公告)号: US08119043B2公开(公告)日: 2012-02-21
- 发明人: Shinichi Kai , Katsuhisa Aratani , Akira Kouchiyama , Kenzo Nakagawa , Yoshihiro Takemoto
- 申请人: Shinichi Kai , Katsuhisa Aratani , Akira Kouchiyama , Kenzo Nakagawa , Yoshihiro Takemoto
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2003-003217 20030109
- 国际申请: PCT/JP03/16620 WO 20031224
- 国际公布: WO2004/064057 WO 20040729
- 主分类号: B29D11/00
- IPC分类号: B29D11/00 ; B29D17/00
摘要:
The method of the present invention includes: an exposing process in which an inorganic resist layer 101 formed on a substrate 100 is irradiated with recording laser light modulated by an information signal corresponding to an information signal of an information concave and convex pattern formed on an optical disc to form an exposed pattern corresponding to the information concave and convex pattern on the optical disc, and after the above process a development process in which development processing is performed on the inorganic resist layer to form a concave and convex pattern corresponding to the information concave and convex pattern of the inorganic resist layer; in the above exposing process, after a trial exposure is performed on a non-recording area of the above resist layer, the exposed portion is irradiated with evaluation laser light and a recording signal characteristic of the above resist layer is evaluated from the reflected light to determine based on the evaluation result an optimum focus position of recording laser light which is later performed; and accordingly the recording signal characteristic (jitter value) of the optical disc is predicted and evaluated in the exposing process from the recording characteristic of the exposed portion on the resist to appropriately adjust an exposure focusing position based on the evaluation result and thus, a master having an appropriate concave and convex pattern and consequently an optical disc having an excellent characteristic can be manufactured.
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