发明授权
US08089610B2 Environmental system including vacuum scavenge for an immersion lithography apparatus
有权
包括用于浸没式光刻设备的真空清除的环境系统
- 专利标题: Environmental system including vacuum scavenge for an immersion lithography apparatus
- 专利标题(中): 包括用于浸没式光刻设备的真空清除的环境系统
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申请号: US11701378申请日: 2007-02-02
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公开(公告)号: US08089610B2公开(公告)日: 2012-01-03
- 发明人: Andrew J. Hazelton , Michael Sogard
- 申请人: Andrew J. Hazelton , Michael Sogard
- 申请人地址: JP Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/52
摘要:
A lithographic projection apparatus includes a liquid confinement structure extending along at least a part of a boundary of a space between a projection system and a substrate table, the space having a cross-sectional area smaller than the area of the substrate. The liquid confinement structure includes a first inlet to supply liquid, through which the patterned beam is projected, to the space, a first outlet to remove liquid after the liquid has passed under the projection system, a second inlet formed in a face of the structure, the face arranged to oppose a surface of the substrate, and located radially outward, with respect to an optical axis of the projection system, of the space to supply gas, and a second outlet formed in the face and located radially outward, with respect to an optical axis of the projection system, of the second inlet to remove gas.
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