Invention Grant
US08088640B2 Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates
有权
用于CIS和/或CIGS薄膜覆盖玻璃基板的大规模加工的热管理和方法
- Patent Title: Thermal management and method for large scale processing of CIS and/or CIGS based thin films overlying glass substrates
- Patent Title (中): 用于CIS和/或CIGS薄膜覆盖玻璃基板的大规模加工的热管理和方法
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Application No.: US12953721Application Date: 2010-11-24
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Publication No.: US08088640B2Publication Date: 2012-01-03
- Inventor: Robert D. Wieting
- Applicant: Robert D. Wieting
- Applicant Address: US CA San Jose
- Assignee: Stion Corporation
- Current Assignee: Stion Corporation
- Current Assignee Address: US CA San Jose
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/00

Abstract:
The thermal management and method for large scale processing of CIS and/or CIGS based thin film overlaying glass substrates. According to an embodiment, the present invention provides a method for fabricating a copper indium diselenide semiconductor film. The method includes providing a plurality of substrates, each of the substrates having a copper and indium composite structure. The method also includes transferring the plurality of substrates into a furnace, each of the plurality of substrates provided in a vertical orientation with respect to a direction of gravity, the plurality of substrates being defined by a number N, where N is greater than 5. The method further includes introducing a gaseous species including a selenide species and a carrier gas into the furnace and transferring thermal energy into the furnace to increase a temperature from a first temperature to a second temperature, the second temperature ranging from about 350° C. to about 450° C. to at least initiate formation of a copper indium diselenide film from the copper and indium composite structure on each of the substrates.
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