Invention Grant
- Patent Title: Electrostatic chuck electrical balancing circuit repair
- Patent Title (中): 静电卡盘电气平衡电路维修
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Application No.: US12205428Application Date: 2008-09-05
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Publication No.: US08064185B2Publication Date: 2011-11-22
- Inventor: Robert T. Hirahara , Vijay D. Parkhe
- Applicant: Robert T. Hirahara , Vijay D. Parkhe
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, L.L.P.
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01T23/00
Abstract:
The present invention includes methods and apparatus for repairing an electrical connection between bipolar electrodes contained within an electrostatic chuck and a conductive mask disposed atop the electrostatic chuck, known as a balancing circuit. Embodiments of the invention are particularly useful after removal of an electrostatic chuck for refurbishment.
Public/Granted literature
- US20100061032A1 ELECTROSTATIC CHUCK ELECTRICAL BALANCING CIRCUIT REPAIR Public/Granted day:2010-03-11
Information query
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