Invention Grant
- Patent Title: Micro-column with simple structure
- Patent Title (中): 微柱结构简单
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Application No.: US11915679Application Date: 2006-05-29
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Publication No.: US08044351B2Publication Date: 2011-10-25
- Inventor: Ho Seob Kim , Byeng Jin Kim
- Applicant: Ho Seob Kim , Byeng Jin Kim
- Applicant Address: KR
- Assignee: Cebt Co. Ltd
- Current Assignee: Cebt Co. Ltd
- Current Assignee Address: KR
- Agency: Park Law Firm
- Agent John K. Park
- Priority: KR10-2005-0047526 20050603
- International Application: PCT/KR2006/002041 WO 20060529
- International Announcement: WO2006/129940 WO 20061207
- Main IPC: G21K5/04
- IPC: G21K5/04

Abstract:
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.
Public/Granted literature
- US20080203881A1 Micro-Column With Simple Structure Public/Granted day:2008-08-28
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