Invention Grant
US08044351B2 Micro-column with simple structure 有权
微柱结构简单

  • Patent Title: Micro-column with simple structure
  • Patent Title (中): 微柱结构简单
  • Application No.: US11915679
    Application Date: 2006-05-29
  • Publication No.: US08044351B2
    Publication Date: 2011-10-25
  • Inventor: Ho Seob KimByeng Jin Kim
  • Applicant: Ho Seob KimByeng Jin Kim
  • Applicant Address: KR
  • Assignee: Cebt Co. Ltd
  • Current Assignee: Cebt Co. Ltd
  • Current Assignee Address: KR
  • Agency: Park Law Firm
  • Agent John K. Park
  • Priority: KR10-2005-0047526 20050603
  • International Application: PCT/KR2006/002041 WO 20060529
  • International Announcement: WO2006/129940 WO 20061207
  • Main IPC: G21K5/04
  • IPC: G21K5/04
Micro-column with simple structure
Abstract:
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.
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