发明授权
- 专利标题： Patterned inorganic film, piezoelectric device, and process for producing the same
- 专利标题（中）： 图案化无机膜，压电装置及其制造方法
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申请号： US12582495申请日： 2009-10-20
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公开(公告)号： US08017185B2公开(公告)日： 2011-09-13
- 发明人: Takayuki Naono , Takamichi Fujii
- 申请人： Takayuki Naono , Takamichi Fujii
- 申请人地址： JP Tokyo
- 专利权人： Fujifilm Corporation
- 当前专利权人： Fujifilm Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Birch, Stewart, Kolasch & Birch, LLP
- 优先权： JP2007-078254 20070326
- 主分类号： B05D1/36
- IPC分类号： B05D1/36
摘要：
An inorganic film formed of an inorganic material on a metal film having a surface including surface-oxidized areas. The surface-oxidized areas are surface oxidized to different degrees. For example, the surface-oxidized areas are one or more lowly-surface-oxidized areas and one or more highly-surface-oxidized areas. The inorganic film includes regions which are respectively formed on the surface-oxidized areas, and the regions have different crystal structures according to the different degrees of surface oxidation. For example, a patterned inorganic film constituted by one or more protruding portions arranged on one or more lowly-surface-oxidized areas of the surface of the metal film can be produced by removing the portions of the inorganic film formed on highly-surface-oxidized areas.
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