发明授权
- 专利标题: Probe and method of making same
- 专利标题(中): 探针及其制作方法
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申请号: US11876180申请日: 2007-10-22
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公开(公告)号: US08012331B2公开(公告)日: 2011-09-06
- 发明人: Oug-Ki Lee , Jung-Hoon Lee
- 申请人: Oug-Ki Lee , Jung-Hoon Lee
- 申请人地址: KR Seoul
- 专利权人: Phicom Corporation
- 当前专利权人: Phicom Corporation
- 当前专利权人地址: KR Seoul
- 代理机构: Daly, Crowley, Mofford & Durkee, LLP
- 优先权: KR10-2003-0016634 20030317
- 主分类号: C25D5/02
- IPC分类号: C25D5/02
摘要:
Disclosed herein are a probe and a method of making the same, and more particularly to a probe having a minute pitch, with which a probe card corresponding to arrangement of pads formed with a massed shape or other various shapes on a wafer is made, and a method of making the same. The probe having a prescribed thickness and formed in the shape of a flat plate. The probe comprises a body part bent at the middle thereof so that the body part is elastically tensioned or compressed when a tension force or a compression force is applied to the body part at the upper and lower ends thereof, a connection part integrally formed with the lower end of the body part, the connection part being fixed to a substrate, and a tip part integrally formed with the upper end of the body part, the tip part contacting a pad of an element.
公开/授权文献
- US20080035487A1 PROBE AND METHOD OF MAKING SAME 公开/授权日:2008-02-14
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