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US07977850B2 Bulk acoustic wave device with a semiconductor layer 失效
具有半导体层的体声波器件

Bulk acoustic wave device with a semiconductor layer
摘要:
A bulk acoustic wave device includes a first electrode, a second electrode, a piezoelectric layer arranged between the first and second electrodes and a semiconductor layer arranged between the first and second electrodes. The semiconductor layer is electrically isolated from the first electrode.
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