发明授权
US07974729B2 Server device and program with sub-recipe measurement communication
有权
服务器设备和程序与子配方测量通信
- 专利标题: Server device and program with sub-recipe measurement communication
- 专利标题(中): 服务器设备和程序与子配方测量通信
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申请号: US12375590申请日: 2007-07-09
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公开(公告)号: US07974729B2公开(公告)日: 2011-07-05
- 发明人: Masashi Takahashi , Minoru Obata , Noriaki Koyama
- 申请人: Masashi Takahashi , Minoru Obata , Noriaki Koyama
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2006-209424 20060801
- 国际申请: PCT/JP2007/063666 WO 20070709
- 国际公布: WO2008/015881 WO 20080207
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit. The output instruction includes an instruction for designating one or more desired number of times of execution of a sub-recipe among plural number of times of execution of the sub-recipe in the recipe and the measurement information acquisition unit acquires measurement information corresponding to the sub-recipe designated by the output instruction.
公开/授权文献
- US20090276076A1 SERVER DEVICE AND PROGRAM 公开/授权日:2009-11-05
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