Invention Grant
US07965021B2 Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element 有权
压电薄膜及其制造方法,喷墨头,用喷墨头形成图像的方法,角速度传感器,角速度传感器测量角速度的方法,压电发生元件,以及用于产生电力的方法 压电发生元件

  • Patent Title: Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element
  • Patent Title (中): 压电薄膜及其制造方法,喷墨头,用喷墨头形成图像的方法,角速度传感器,角速度传感器测量角速度的方法,压电发生元件,以及用于产生电力的方法 压电发生元件
  • Application No.: US12844582
    Application Date: 2010-07-27
  • Publication No.: US07965021B2
    Publication Date: 2011-06-21
  • Inventor: Takakiyo HarigaiHideaki AdachiEiji Fujii
  • Applicant: Takakiyo HarigaiHideaki AdachiEiji Fujii
  • Applicant Address: JP Osaka
  • Assignee: Panasonic Corporation
  • Current Assignee: Panasonic Corporation
  • Current Assignee Address: JP Osaka
  • Agency: McDermott Will & Emery LLP
  • Priority: JP2009-009495 20090120
  • Main IPC: H01L41/187
  • IPC: H01L41/187
Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element
Abstract:
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention includes: a LaNiO3 film having a (001) orientation; an interface layer having a (001) orientation and composed of a compound represented by a chemical formula ABO3 (where A is represented by (Bi,Na)1-xCx (0≦x≦1), B is Ti or TiZr, and C is an alkali metal other than Na); and a (Bi,Na,Ba)TiO3 film having a (001) orientation. The LaNiO3 film, the interface layer, and the (Bi,Na,Ba)TiO3 film are laminated in this order.
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