发明授权
US07945965B2 Sensor for observations in liquid environments and observation apparatus for use in liquid environments
有权
用于液体环境中观察的传感器和用于液体环境的观察设备
- 专利标题: Sensor for observations in liquid environments and observation apparatus for use in liquid environments
- 专利标题(中): 用于液体环境中观察的传感器和用于液体环境的观察设备
-
申请号: US12416634申请日: 2009-04-01
-
公开(公告)号: US07945965B2公开(公告)日: 2011-05-17
- 发明人: Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
- 申请人: Naoya Watanabe , Masatsugu Shigeno , Masato Iyoki
- 申请人地址: JP Chiba
- 专利权人: SII NanoTechnology Inc.
- 当前专利权人: SII NanoTechnology Inc.
- 当前专利权人地址: JP Chiba
- 代理机构: Brinks Hofer Gilson & Lione
- 优先权: JP2008-106897 20080416
- 主分类号: H01J37/252
- IPC分类号: H01J37/252
摘要:
The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.
公开/授权文献
信息查询