Invention Grant
- Patent Title: Method of making BIOMEMS devices
- Patent Title (中): 制作BIOMEMS设备的方法
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Application No.: US12651561Application Date: 2010-01-04
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Publication No.: US07927904B2Publication Date: 2011-04-19
- Inventor: Luc Ouellet , Stephane Martel
- Applicant: Luc Ouellet , Stephane Martel
- Applicant Address: CA Waterloo, ON
- Assignee: DALSA Semiconductor Inc.
- Current Assignee: DALSA Semiconductor Inc.
- Current Assignee Address: CA Waterloo, ON
- Agency: Marks & Clerk
- Agent Richard J. Mitchell
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A MEMS device is manufactured by first forming a self-aligned monolayer (SAM) on a carrier wafer. Next, a first polymer layer is formed on the self-aligned monolayer. The first polymer layer is patterned form a microchannel cover, which is then bonded to a patterned second polymer layer on a device wafer to form microchannels. The carrier wafer is then released from the first polymer layer.
Public/Granted literature
- US20100173436A1 METHOD OF MAKING BIOMEMS DEVICES Public/Granted day:2010-07-08
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