发明授权
- 专利标题: Manufacturing process for embedded semiconductor device
- 专利标题(中): 嵌入式半导体器件制造工艺
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申请号: US12889829申请日: 2010-09-24
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公开(公告)号: US07923299B2公开(公告)日: 2011-04-12
- 发明人: Chien-Hao Wang
- 申请人: Chien-Hao Wang
- 申请人地址: TW Kaohsiung
- 专利权人: Advanced Semiconductor Engineering, Inc.
- 当前专利权人: Advanced Semiconductor Engineering, Inc.
- 当前专利权人地址: TW Kaohsiung
- 代理机构: J.C. Patents
- 优先权: TW97103478A 20080130
- 主分类号: H01L21/44
- IPC分类号: H01L21/44 ; H01L21/48 ; H01L21/50
摘要:
A manufacturing process for an embedded semiconductor device is provided. In the manufacturing process, at least one insulation layer and a substrate are stacked to each other, and a third metal layer is laminated on the insulation layer to embed a semiconductor device in the insulation layer. The substrate has a base, a first circuit layer, a second circuit layer, and at least a first conductive structure passing through the base and electrically connected to the first circuit layer and the second circuit layer. In addition, the third metal layer is patterned to form a third circuit layer having a plurality of third pads.
公开/授权文献
- US20110014751A1 MANUFACTURING PROCESS FOR EMBEDDED SEMICONDUCTOR DEVICE 公开/授权日:2011-01-20
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