发明授权
- 专利标题: Vertical type heat processing apparatus and vertical type heat processing method
- 专利标题(中): 垂直式热处理装置和立式热处理方法
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申请号: US12068560申请日: 2008-02-07
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公开(公告)号: US07922485B2公开(公告)日: 2011-04-12
- 发明人: Hiromi Nitadori , Katsuyuki Hishiya
- 申请人: Hiromi Nitadori , Katsuyuki Hishiya
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2007-033665 20070214; JP2007-195591 20070727
- 主分类号: F27D3/12
- IPC分类号: F27D3/12
摘要:
Disclosed is a vertical type heat processing apparatus and a vertical type heat processing method, which can prevent fall down of the boat on a boat carrier mechanism to be caused by an external force, such as an earthquake or the like, by employing a simple structure, while taking a form of the two-boat system. The vertical type heat processing apparatus 1 includes a heating furnace 5 having a furnace port 5a, a cover 17 adapted to close the furnace port 5a, a pair of substrate holding tools 4 each adapted to hold multiple substrates W in a multistage fashion and configured to be placed on the cover 17 via a heat insulating mount 19, and a lifting mechanism 18 adapted to raise and lower the cover 17 so as to carry in and carry out each substrate holding tool 4 relative to the heating furnace 5. When one substrate holding tool 4 is in the heating furnace 5, the other substrate holding tool 4 is placed on a substrate-holding-tool table 22 for loading the substrates W thereon. Each substrate holding tool 4 is carried between the-substrate-holding-tool table 22 and the heat insulating mount 19 due to the substrate-holding-tool carrier mechanism 23. To the substrate-holding-carrier mechanism 23, a fall-down prevention member 37 adapted to control each substrate holding tool 4 is provided.
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