发明授权
- 专利标题: Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers
- 专利标题(中): 单片极化控制角扩散器,相关方法和并入受控角扩散器的光刻系统
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申请号: US11711854申请日: 2007-02-28
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公开(公告)号: US07916390B2公开(公告)日: 2011-03-29
- 发明人: Marc D. Himel , Alan D. Kathman
- 申请人: Marc D. Himel , Alan D. Kathman
- 申请人地址: US NC Charlotte
- 专利权人: Tessera North Carolina, Inc.
- 当前专利权人: Tessera North Carolina, Inc.
- 当前专利权人地址: US NC Charlotte
- 代理机构: Lee & Morse, P.C.
- 主分类号: G02B5/30
- IPC分类号: G02B5/30
摘要:
A monolithic polarization controlled angle diffuser includes a system having a first surface and a second surface, a controlled angle diffuser pattern for providing an angular distribution at an illumination plane, the controlled angle diffuser pattern being on one of the first and second surfaces of the substrate, and a polarizing pattern on one of the first and second surfaces of the substrate. The controlled angle diffuser pattern includes at least two controlled angle diffuser elements. Each controlled angle diffuser element outputs different angular distributions. The polarizing pattern includes at least two polarizing elements. Each polarizing element corresponds to a respective controlled angle diffuser element. The at least two polarizing elements output polarizations are rotated with respect to one another.
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