发明授权
US07916390B2 Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers 有权
单片极化控制角扩散器,相关方法和并入受控角扩散器的光刻系统

Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers
摘要:
A monolithic polarization controlled angle diffuser includes a system having a first surface and a second surface, a controlled angle diffuser pattern for providing an angular distribution at an illumination plane, the controlled angle diffuser pattern being on one of the first and second surfaces of the substrate, and a polarizing pattern on one of the first and second surfaces of the substrate. The controlled angle diffuser pattern includes at least two controlled angle diffuser elements. Each controlled angle diffuser element outputs different angular distributions. The polarizing pattern includes at least two polarizing elements. Each polarizing element corresponds to a respective controlled angle diffuser element. The at least two polarizing elements output polarizations are rotated with respect to one another.
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