发明授权
- 专利标题: Semiconductor storage device
- 专利标题(中): 半导体存储设备
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申请号: US12404804申请日: 2009-03-16
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公开(公告)号: US07910973B2公开(公告)日: 2011-03-22
- 发明人: Takeshi Sakaguchi , Hiroyuki Nitsuta
- 申请人: Takeshi Sakaguchi , Hiroyuki Nitsuta
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2008-067544 20080317; JP2008-068745 20080318
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L29/94
摘要:
A non-volatile semiconductor storage device has: a plurality of memory strings with a plurality of electrically rewritable memory cells connected in series; and a capacitor element area including capacitor elements. Each of the memory strings includes: a plurality of first conductive layers laminated on a substrate; and a plurality of first interlayer insulation layers formed between the plurality of first conductive layers. The capacitor element area includes: a plurality of second conductive layers laminated on a substrate and formed in the same layer as the first conductive layers; and a plurality of second interlayer insulation layers formed between the plurality of second conductive layers and formed in the same layer as the first interlayer insulation layers. A group of the adjacently-laminated second conductive layers is connected to a first potential, while another group thereof is connected to a second potential.
公开/授权文献
- US20090230449A1 SEMICONDUCTOR STORAGE DEVICE 公开/授权日:2009-09-17
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