发明授权
- 专利标题: Probe card with stacked substrate
- 专利标题(中): 带堆叠衬底的探头卡
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申请号: US11885479申请日: 2006-02-21
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公开(公告)号: US07898276B2公开(公告)日: 2011-03-01
- 发明人: Scott R. Williams , Bahadir Tunaboylu , John McGlory
- 申请人: Scott R. Williams , Bahadir Tunaboylu , John McGlory
- 申请人地址: SG Singapore
- 专利权人: SV Probe PTE Ltd.
- 当前专利权人: SV Probe PTE Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Hickman Palermo Truong & Becker LLP
- 代理商 Edward A. Becker
- 国际申请: PCT/US2006/005865 WO 20060221
- 国际公布: WO2006/093704 WO 20060908
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
A probe card is provided including a first substrate, a second substrate, and a plurality of conductive wires extending between the first substrate and the second substrate. The conductive wires are fixed (a) at a first end to a contact of the first substrate, and (b) at a second end to a contact of the second substrate.
公开/授权文献
- US20080246501A1 Probe Card With Stacked Substrate 公开/授权日:2008-10-09
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