发明授权
- 专利标题: Phase change memory with various grain sizes
- 专利标题(中): 具有各种晶粒尺寸的相变记忆体
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申请号: US11858712申请日: 2007-09-20
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公开(公告)号: US07893420B2公开(公告)日: 2011-02-22
- 发明人: Chun-Sheng Liang , Tzyh-Cheang Lee , Fu-Liang Yang
- 申请人: Chun-Sheng Liang , Tzyh-Cheang Lee , Fu-Liang Yang
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Seminconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Seminconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A memory device includes a phase change element, which further includes a first phase change layer having a first grain size; and a second phase change layer over the first phase change layer. The first and the second phase change layers are depth-wise regions of the phase change element. The second phase change layer has a second average grain size different from the first average grain size.
公开/授权文献
- US20090078924A1 Phase Change Memory with Various Grain Sizes 公开/授权日:2009-03-26
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