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US07893420B2 Phase change memory with various grain sizes 有权
具有各种晶粒尺寸的相变记忆体

Phase change memory with various grain sizes
摘要:
A memory device includes a phase change element, which further includes a first phase change layer having a first grain size; and a second phase change layer over the first phase change layer. The first and the second phase change layers are depth-wise regions of the phase change element. The second phase change layer has a second average grain size different from the first average grain size.
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