发明授权
- 专利标题: Probing apparatus with impedance optimized interface
- 专利标题(中): 具有阻抗优化接口的探测装置
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申请号: US12287213申请日: 2008-10-06
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公开(公告)号: US07888957B2公开(公告)日: 2011-02-15
- 发明人: Kenneth R. Smith , Roger Hayward
- 申请人: Kenneth R. Smith , Roger Hayward
- 申请人地址: US OR Beaverton
- 专利权人: Cascade Microtech, Inc.
- 当前专利权人: Cascade Microtech, Inc.
- 当前专利权人地址: US OR Beaverton
- 代理机构: Chernoff, Vilhauer, McClung & Stenzel, LLP
- 主分类号: G01R31/00
- IPC分类号: G01R31/00
摘要:
In a membrane probing apparatus, the impedance of the interface between coaxial cables connected to the test instrumentation and the membrane supported co-planar waveguide that conductively connects to the probe's contacts is optimized by eliminating a ground plane in the interface board.
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