发明授权
- 专利标题: Phase change memory device
- 专利标题(中): 相变存储器件
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申请号: US12008125申请日: 2008-01-09
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公开(公告)号: US07888667B2公开(公告)日: 2011-02-15
- 发明人: Yoon-Jong Song , Se-Ho Lee , Ki-Nam Kim , Su-Youn Lee , Jae-Hyun Park
- 申请人: Yoon-Jong Song , Se-Ho Lee , Ki-Nam Kim , Su-Youn Lee , Jae-Hyun Park
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Mills & Onello, LLP
- 优先权: KR2004-56000 20040719
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L21/00 ; G11C11/00
摘要:
A phase change memory device includes a mold layer disposed on a substrate, a heating electrode, a filling insulation pattern and a phase change material pattern. The heating electrode is disposed in an opening exposing the substrate through the mold layer. The heating electrode is formed in a substantially cylindrical shape, having its sidewalls conformally disposed on the lower inner walls of the opening. The filling insulation pattern fills an empty region surrounded by the sidewalls of the heating electrode. The phase change material pattern is disposed on the mold layer and downwardly extended to fill the empty part of the opening. The phase change material pattern contacts the top surfaces of the sidewalls of the heating electrode.
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